JPH04557B2 - - Google Patents

Info

Publication number
JPH04557B2
JPH04557B2 JP62071387A JP7138787A JPH04557B2 JP H04557 B2 JPH04557 B2 JP H04557B2 JP 62071387 A JP62071387 A JP 62071387A JP 7138787 A JP7138787 A JP 7138787A JP H04557 B2 JPH04557 B2 JP H04557B2
Authority
JP
Japan
Prior art keywords
hole
axis direction
block body
piezoelectric actuator
gripping mechanism
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP62071387A
Other languages
English (en)
Japanese (ja)
Other versions
JPS63238492A (ja
Inventor
Hiroshi Tokumoto
Hiroshi Bando
Akio Suzuki
Sadao Kawashima
Osamu Mizuguchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kobe Steel Ltd
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
Agency of Industrial Science and Technology
Kobe Steel Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology, Kobe Steel Ltd filed Critical Agency of Industrial Science and Technology
Priority to JP62071387A priority Critical patent/JPS63238492A/ja
Publication of JPS63238492A publication Critical patent/JPS63238492A/ja
Publication of JPH04557B2 publication Critical patent/JPH04557B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Details Of Measuring And Other Instruments (AREA)
  • Control Of Position Or Direction (AREA)
  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
JP62071387A 1987-03-27 1987-03-27 X−y−z移動機構 Granted JPS63238492A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62071387A JPS63238492A (ja) 1987-03-27 1987-03-27 X−y−z移動機構

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62071387A JPS63238492A (ja) 1987-03-27 1987-03-27 X−y−z移動機構

Publications (2)

Publication Number Publication Date
JPS63238492A JPS63238492A (ja) 1988-10-04
JPH04557B2 true JPH04557B2 (en]) 1992-01-07

Family

ID=13459047

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62071387A Granted JPS63238492A (ja) 1987-03-27 1987-03-27 X−y−z移動機構

Country Status (1)

Country Link
JP (1) JPS63238492A (en])

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20210133845A (ko) * 2020-04-28 2021-11-08 선전 베륨 프리시젼 옵틱스 컴퍼니.,리미티드. 필터 장착구조

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20210133845A (ko) * 2020-04-28 2021-11-08 선전 베륨 프리시젼 옵틱스 컴퍼니.,리미티드. 필터 장착구조

Also Published As

Publication number Publication date
JPS63238492A (ja) 1988-10-04

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term